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  4.5 Vacuum Robotic Arm

The 4.5 Robotic Arm is a 3-Axis (R, ?, Z) vacuum compatible SCARA robot specifically designed for the Semiconductor industry. The robot can be configured with a variety of different arm sections and end-effectors to meet nearly any requirement. The unit is standardly supplied with an integral controller so no remote "boxes" are needed. Control is via an RS-232 connection to the host system and a teach pendant is supplied for setup.

Please contact EMS for information on the 4.5 Robot and how it can be configured to meet your specific needs.

PDF file for product “Cut Sheet”
PDF file for typical installation drawing

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