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  48V Vacuum Elevator

The 48V Vacuum Elevator is a single axis, vacuum compatible, robotic device designed to vertically index semiconductor wafer cassettes. Designed to accept a variety cassette mounting plates and available different stroke lengths the 48V is adaptable to must vacuum cassette configurations. The unit is standardly supplied with an integral controller so no remote "boxes" are needed. Control interface is via an RS-232 connection to the host system which also provides the access setup.

Please contact EMS for more information on the 48V Vacuum Elevator and how it can be configured to meet your specific needs.

PDF file for product "cut Sheet"
PDF file for typical installation drawing

   
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